Analog Devices Inc.

Low Noise, Low Drift, Low Power 3-Axis MEMS Accelerometer Features: 0 g offset vs. temperature (all axes): 0.45 mg/°C typical Ultralow noise density (all axes): 80 μg/√Hz Low power, VSUPPLY (LDO enabled) In measurement mode: 200 μA In standby mode: 21 μA Digital output features Digital SPI and limited I2C interfaces supported 20-bit ADC Data interpolation routine for synchronous sampling Programmable high-pass and low-pass digital filters Integrated temperature sensor Voltage range options VSUPPLY with internal regulators: 2.25 V to 3.6 V V1P8ANA, V1P8DIG with internal LDO regulator bypassed: 1.8 V typical ± 10% Operating temperature range: −40°C to +125°C 14-terminal, 4 mm × 4 mm × 1.04 mm, LGA package