Compact, Precision Six Degrees of Freedom Inertial Sensor Features: Triaxial digital gyroscope with digital range scaling ±250°/sec, ±500°/sec, ±1000°/sec settings Axis to axis misalignment: ±0.05° Triaxial digital accelerometer dynamic range: ±18 g minimum Autonomous operation and data collection No external configuration commands required 205 ms typical power-on start-up time Factory calibrated sensitivity, bias, and axial alignment Calibration temperature range: −40°C to +85°C SPI-compatible Optional burst read sequence for fast data transfer Embedded temperature sensor Programmable operation and control Automatic and manual bias correction controls Bartlett window FIR length, number of taps Digital I/O: data ready, alarm indicator, general-purpose Alarms for condition monitoring Optional external sync input clock up to 1.1 kHz Single command self test Power supply voltage range: 3.15 V to 3.45 V 2000 g mechanical shock survivability Operating temperature range: −40°C to +105°C

Six Degrees of Freedom Inertial Sensor Avionics Certification Support Features: DO-178C/DO-254 Design Assurance Level (DAL) B certification intent ED-12C certification intent Triaxial, digital gyroscope, ±450°/sec dynamic range ±0.018° axis-to-axis misalignment error 6°/Hr in-run bias stability 0.3°/√Hr angular random walk 0.045°/sec nonlinearity Triaxial, digital accelerometer, ±5 g dynamic range Triaxial, delta angle and delta velocity outputs Factory calibrated sensitivity, bias, and axial alignment Calibration temperature range: −40°C to +85°C Serial peripheral interface (SPI) compatible Programmable operation and control Automatic and manual bias correction controls 4 FIR filter banks, 120 configurable taps Digital I/O: data ready alarm indicator, external clock Alarms for condition monitoring Power-down/sleep mode for power management Optional external sample clock input: up to 2.4 kHz Continuous self test of inertial sensors On demand self test of inertial sensors Continuous CRC-based memory testing Single-supply operation: 3.0 V to 3.6 V 2000 g mechanical shock survivability Operating temperature range: −40°C to +105°C

Low Noise, Wide Bandwidth, MEMS Accelerometer Features: Single, in-plane axis accelerometer with analog output Full-scale range: ±200 g Linear frequency response range: dc to 15 kHz typical (3 dB point) Resonant frequency: 28 kHz typical Sensitivity performance Sensitivity stability over temperature within ± 5% Linearity to ±0.2% of full-scale range Cross-axis sensitivity ± 1%/± 0.8% (z-axis acceleration effect on x-axis, y-axis acceleration effect on x-axis) Ultralow noise density 45 μg/√Hz Overrange sensing plus dc coupling allows fast recovery time Complete electromechanical self test Single-supply operation Output voltage ratiometric to supply Low power consumption: 1.0 mA typical Power saving standby operation mode with fast recovery RoHS compliant −40°C to +125°C temperature range 32-lead, 5 mm × 5 mm × 1.8 mm LFCSP package

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