Low Noise, Wide Bandwidth, MEMS Accelerometer Features: Single, in-plane axis accelerometer with analog output Full-scale range: ±200 g Linear frequency response range: dc to 15 kHz typical (3 dB point) Resonant frequency: 28 kHz typical Sensitivity performance Sensitivity stability over temperature within ± 5% Linearity to ±0.2% of full-scale range Cross-axis sensitivity ± 1%/± 0.8% (z-axis acceleration effect on x-axis, y-axis acceleration effect on x-axis) Ultralow noise density 45 μg/√Hz Overrange sensing plus dc coupling allows fast recovery time Complete electromechanical self test Single-supply operation Output voltage ratiometric to supply Low power consumption: 1.0 mA typical Power saving standby operation mode with fast recovery RoHS compliant −40°C to +125°C temperature range 32-lead, 5 mm × 5 mm × 1.8 mm LFCSP package

Small, Low Power, 3-Axis 2 g Accelerometer Features:3-axis sensingSmall, low profile package4 mm 4 mm 1.45 mm LFCSPLow power: 350 A typicalSingle-supply operation: 1.8 V to 3.6 V10,000 g shock survivalExcellent temperature stabilityBandwidth adjustment with a single capacitor per axisRoHS/WEEE lead-free compliant

Nanopower, 3-Axis, 2 g/4 g/8 g Digital Output MEMS Accelerometer Features: Supply voltage range Single-cell battery operation: 1.1 V to 3.6 V Internal power supply regulation for high PSRR Ultralow power 0.89 μA at 100 Hz ODR, 2.0 V supply 180 nA motion activated wake-up mode 40 nA standby current High resolution: 0.25 mg/LSB Built-in features for system level power savings Single-tap and double-tap detection with only 35 nA of added current Adjustable threshold sleep and wake-up modes for motion activation Autonomous interrupt processing, without need for microcontroller intervention, to allow the rest of the system to be turned off completely Deep 512 sample embedded FIFO minimizes host processor load Awake state output enables implementation of motion activated switch Low noise to 170 μg/√Hz Acceleration sample synchronization via external trigger On-chip temperature sensor Internal two-pole antialias filter SPI (4-wire) and I2C digital interfaces Small and thin 2.2 mm × 2.3 mm × 0.87 mm package

Micropower, 3-Axis, 400 g, Digital Output, MEMS Accelerometer Features: ±400 g measurement range 160 Hz to 2560 Hz user selectable bandwidth with 4-pole antialiasing filter Selectable oversampling ratio Adjustable high-pass filter Ultra Low power Power can be derived from a coin cell battery 19 μA at 2560 Hz ODR, 2.5 V supply Low power wake-up mode for low g activity detection 1.4 μA instant on mode with adjustable threshold 0.1 μA standby mode Built-in features for system level power savings Autonomous interrupt processing without processor intervention Ultra low power event monitoring: detects impacts and wakes up fast enough to capture the transient events Adjustable low g threshold activity and inactivity detection Wide operating voltage range: 1.6 V to 3.5 V Acceleration sample synchronization via external trigger SPI digital interface and I2C interface format support 12-bit output at 200 mg/LSB scale factor Wide temperature range: −40°C to +105°C Small, thin 3.00 mm × 3.25 mm × 1.06 mm package

Precision MEMS IMU Module Features: Triaxial, digital gyroscope  ±125°/sec, ±500°/sec, ±2000°/sec dynamic range models 2°/hr in-run bias stability (ADIS16465-1)  0.15°/√hr angular random walk (ADIS16465-1 and ADIS16465-2)  ±0.05° axis to axis misalignment error  Triaxial, digital accelerometer, ±8 g 3.6 μg in-run bias stability Triaxial, delta angle, and delta velocity outputs Factory calibrated sensitivity, bias, and axial alignment Calibration temperature range: −40°C to +85°C   SPI-compatible data communications Programmable operation and control  Automatic and manual bias correction controls Data ready indicator for synchronous data acquisition External sync modes: direct, pulse, scaled, and output On demand self test of inertial sensors On demand self test of flash memory Single-supply operation (VDD): 3.0 V to 3.6 V 2000 g mechanical shock survivability Operating temperature range: −40°C to +105°C

Precision MEMS IMU Module Features: Triaxial, digital gyroscope  ±125°/sec, ±500°/sec, ±2000°/sec dynamic range models 2°/hr in-run bias stability (ADIS16465-1)  0.15°/√hr angular random walk (ADIS16465-1 and ADIS16465-2)  ±0.05° axis to axis misalignment error  Triaxial, digital accelerometer, ±8 g 3.6 μg in-run bias stability Triaxial, delta angle, and delta velocity outputs Factory calibrated sensitivity, bias, and axial alignment Calibration temperature range: −40°C to +85°C   SPI-compatible data communications Programmable operation and control  Automatic and manual bias correction controls Data ready indicator for synchronous data acquisition External sync modes: direct, pulse, scaled, and output On demand self test of inertial sensors On demand self test of flash memory Single-supply operation (VDD): 3.0 V to 3.6 V 2000 g mechanical shock survivability Operating temperature range: −40°C to +105°C

Precision MEMS IMU Module Features: Triaxial, digital gyroscope ±125°/sec, ±500°/sec, ±2000°/sec dynamic range models 2°/hr in-run bias stability (ADIS16467-1) 0.15°/√hr angular random walk (ADIS16467-1 and ADIS16467-2) ±0.05° axis to axis misalignment error Triaxial, digital accelerometer, ±40 g 13 μg in-run bias stability Triaxial, delta angle, and delta velocity outputs Factory calibrated sensitivity, bias, and axial alignment Calibration temperature range: −40°C to +85°C SPI-compatible data communications Programmable operation and control Automatic and manual bias correction controls Data ready indicator for synchronous data acquisition External sync modes: direct, pulse, scaled, and output On demand self test of inertial sensors On demand self test of flash memory Single-supply operation (VDD): 3.0 V to 3.6 V 2000 g mechanical shock survivability Operating temperature range: −40°C to +105°C

Precision, Miniature MEMS IMU

Features:

• Triaxial, digital gyroscop
  • ±125°/sec, ±500°/sec, ±2000°/sec dynamic range models
  • 2.3°/hr in-run bias stability (ADIS16507-1)
  • 0.13°/√hr angular random walk, x-axis and y-axis, 1 σ (ADIS16507-1)
  • ±0.25° axis to axis misalignment error
• Triaxial, digital accelerometer, ±392 m/sec2 dynamic range
  • 125 μm/sec2 in-run bias stability, x-axis and y-axis, 1 σ
• Triaxial, delta angle and delta velocity outputs
• Factory calibrated sensitivity, bias, and axial alignment
  • Calibration temperature range: −40°C to +85°C
• SPI compatible data communications
• Programmable operation and control
  • Automatic and manual bias correction controls
  • Data ready indicator for synchronous data acquisition
  • External sync modes: direct, scaled, and output
  • On demand self-test of inertial sensors
  • On demand self-test of flash memory
• Single-supply operation (VDD): 3.0 V to 3.6 V
• 19,600 m/sec2 mechanical shock survivability
• Operating temperature range: −40°C to +105°C

Applications:

• Navigation, stabilization, and instrumentation
• Unmanned and autonomous vehicles
• Smart agriculture and construction machinery
• Factory/industrial automation, robotics
• Virtual/augmented reality
• Internet of Moving Things

Ultralow noise, dual-axis MEMS Gyroscope for Stabilization Applications Features: Pitch and roll rate gyroscope Ultralow noise: 0.004°/s/√Hz High vibration rejection over a wide frequency range Power saving standby mode 80 µA current consumption in standby mode Fast startup time from standby mode: <100 ms Low delay of <0.5 ms for a 30 Hz input at the widest bandwidth setting Serial peripheral interface (SPI) digital output Programmable high-pass and low-pass filters 2000 g powered acceleration survivability 2.7 V to 5.0 V operation −25°C to +85°C operation 4.5 mm × 5.8 mm × 1.2 mm cavity laminate package

3-Axis, 0.5 g/1 g/2 g/4 g Digital Accelerometer Features: Ultralow power (scales automatically with data rate) As low as 30 μA in measurement mode (VS = 3.3 V) As low as 0.1 μA in standby mode (VS = 3.3 V) Low noise performance 150 μg/√Hz typical for X- and Y-axes 250 μg/√Hz typical for the Z-axis Embedded, patent pending FIFO technology minimizes host processor load User-selectable resolution Fixed 10-bit resolution for any g range Fixed 1024 LSB/g sensitivity for any g range Resolution scales from 10-bit at ±0.5 g to 13-bit at ±4 g Built-in motion detection functions for activity/inactivity monitoring Supply and I/O voltage range: 2.0 V to 3.6 V See data sheet for additional features